Ceramic Sputtering Targets
Time:2021-11-06 Author:Changsha Xinkang scientific research material service platform
We can literally know that the ceramic target is a relatively brittle target, and usually the ceramic target is used in conjunction with the backplane. In addition to supporting the ceramic target during the sputtering process, the backing plate can also play the role of heat transfer during the sputtering process. There are many types of ceramic targets with a wide range of applications, mainly used in the field of microelectronics, displays, storage and other fields. The ceramic targets produced by Xinkang have sufficient stock, excellent price, high purity, short delivery period and guaranteed quality!
Types of ceramic targets
Semiconductor related ceramic targets, display ceramic targets, magnetic recording ceramic targets, optical recording ceramic targets, superconducting ceramic targets, giant magnetoresistance ceramic targets, etc.
Preparation process of ceramic target
Baking - Batching - Ball Milling - Drying - Calcination - Ball Milling - Forming - Sintering - Cooling - Finished Product
Characteristics of ceramic targets
We produce ceramic targets with high purity, high density and uniform composition and structure
Ceramic sputtering targets provided by Xinkang
氧化物 Oxide | |||
氧化铝(Al2O3) | 氧化镓(Ga2O3) | 氧化钼(MoO3) | 氧化钽 (Ta2O5) |
氧化锌铝(AZO) | 氧化镓锌(GZO) | 氧化铌(Nb2Ox) | 氧化铽(Tb4O7) |
氧化锡锑(ATO) | 氧化钆(Gd2O3) | 氧化镍(NiO) | 氧化铥(Tm2O3) |
氧化铋(Bi2O3) | 二氧化铪(HfO2) | 氧化钕(Nd2O3) | 二氧化钒(VO2) |
钛酸铋(BiTiO3) | 氧化钬(Ho2O3) | 氧化铅(PbO) | 三氧化二钒(V2O3) |
钛酸钡(BaTiO3) | 氧化铟(In2O3) | 锆钛酸铅(PZT) | 五氧化二钒(V2O5) |
氧化铈(CeO2) | 氧化铟锡(ITO) | 氧化镨(Pr6O11) | 三氧化钨(WO3) |
氧化铬(Cr2O3) | 氧化铟锌(IZO) | 一氧化硅(SiO) | 氧化钇(Y2O3) |
氧化钴(CoO) | 氧化铟镓锌(IGZO) | 二氧化硅(SiO2) | 氧化钇锆(YSZ) |
氧化铜(CuO) | 氧化镧(La2O3) | 氧化钐(Sm2O3) | 钇钡铜氧(YBCO) |
氧化亚铜(Cu2O) | 镧锶钴氧(LSCO) | 氧化钪(Sc2O3) | 氧化锌(ZnO) |
氧化铒(Er2O3) | 铝酸镧(LaAl2O3) | 钛酸锶(SrTiO3) | 氧化锆(ZrO2) |
氧化铕(Eu2O3) | 镍酸镧(LaNiO3) | 钌酸锶(SrRuO3) | 氧化锌锡(ZTO) |
三氧化二铁(Fe2O3) | 铁酸镧(LaFeO3) | 锰酸锶(SrMnO3) | |
四氧化三铁(Fe3O4) | 锰酸镧(LaMnO3) | 二氧化钛(TiO2) | |
氧化锡氟(FTO) | 氧化镁(MgO) | 五氧化三钛(Ti3O5) | |
氟化物 Fluoride | |||
氟化铝(AlF3) | 氟化锂(LiF) | 冰晶(Na2AlF6) | 氟化镱(YbF3) |
氟化钡(BaF2) | 氟化镧(LaF3) | 氟化钾(KF) | 氟化钇(YF3) |
氟化钙(CaF2) | 氟化镁(MgF2) | 氟化镨(PrF3) | 氟化锌(ZnF3) |
氟化铈(CeF3) | 氟化钕(NdF3) | 氟化锶(SrF3) | |
氟化镝(DyF3) | 氟化钠(NaF) | 氟化钐(SmF3) | |
氮化物 Nitride | |||
氮化铝(AlN) | 氮化铌(NbN) | 氮化钛(TiN) | 氮化钽(TaN) |
氮化硼(BN) | 氮化硅(Si3N4) | 氮化钒(VN) | 氮化锆(ZrN) |
氮化铪(HfN) | |||
碳化物 Carbide | |||
碳化硼(B4C) | 碳化镍(NiC) | 碳氮化钛(TiCN) | 碳化锆(ZrC) |
碳化铪(HfC) | 碳化硅(SiC) | 碳化钨(WC) | |
碳化钼(MoC) | 碳化钽(TaC) | 碳化钨钴(WC+Co) | |
碳化铌(NbC) | 碳化钛(TiC) | 碳化钒(VC) | |
硼化物 Boride | |||
二硼化铬(CrB2) | 硼化铁(FeB) | 硼化钽(TaB) | 二硼化钛(TiB2) |
二硼化铪(HfB2) | 六硼化镧(LaB6) | 二硼化锆(ZrB2) | |
硫化物 Sulfide | |||
硫化镉(CdS) | 硫化铅(PbS) | 硫化铟(In2S3) | 硫化镁(MgS) |
硫化铜(CuS) | 硫化钼(MoS2) | 硫化钽(TaS) | 硫化锑(Sb2S3) |
硫化铈(Ce2S3) | 硫化锰(MnS) | 硫化钨(WS2) | |
硫化铁(FeS) | 硫化铌(NbS) | 硫化锌(ZnS) | |
硒化物 Selenide | |||
硒化铋(Bi2Se3) | 硒化铬(CrSe) | 硒化钼(MoSe2) | 硒化锗(GeSe2) |
硒化铜(Cu2Se) | 硒化铅(PbSe) | 硒化铟(In2Se3) | 硒化钨(WSe2) |
硒化镉(CdSe) | 硒化锑(Sb2Se3) | 硒化镓(Ga2Se3) | 硒化锡(SnSe) |
碲化物 Telluride | |||
碲化镉(CdTe) | 碲化铅(PbTe) | 碲化锗(GeTe) | 碲化锗锑(GST) |
碲化铋(Bi2Te3) | 三碲化二锑(Sb2Te3) | 三碲化七锑(Sb7Te3) | |
锑化物 Antimonide | |||
锑化铝(AlSb) | 锑化铟(InSb) | 锑化镓(GaSb) | 锑化锌(ZnSb) |
多元化合物 Polycompound | |||
氧化铟镓锌(IGZO) | 碳化钨钴(WC+Co) | 氧化锌锡(ZTO) | 氧化锡锑(ATO) |
镧锶钴氧(LSCO) | 碳化钨镍(WC+Ni) | 氧化钇锆(YSZ) | 铜锌锡硫(CZTS) |
钇钡铜氧(YBCO) | 氧化铟锡(ITO) | 钇钡铜氧(YBCO) | 铜锌锡硒硫(CZTSS) |
镧锶锰氧(LSMO) | 氧化铟锌(IZO) | 钇铁石榴石(YIG) | |
铁电/锂电池用材料 Materials for Ferroelectric/Lithium Batteries | |||
钴酸锂(LiCoO2) | 铝掺杂锰酸锂(LiMn2O4+Alx) | 钛酸铋BiTiO3 3N-5N | 镧钙锰氧(LCMO) |
富锂钴酸锂(Li(1+x)CoO2) | 磷酸锂(Li3PO4) | 氧化硼掺磷酸锂(Li3PO4:B2O3) | 钴酸锂(LiCo2O4) |
铝掺杂钴酸锂(AlLiCoO2) | 钛酸锶SrTiO3 3N-5N | 钛酸镧锂(Li0.35La0.57TiO3) | 钛酸锶钡(BaSrTiO3) |
锰酸锂(LiMn2O4) | 磷酸铁锂(LiFePO4) | 镧锆锂氧(LLZO) | 锆钛酸铅(PZT) |
钛酸钡(BaTiO3) | 钛酸锂(Li4Ti5O12) | 镧锶锰氧(LSMO) | |
锰镍酸锂(LiNi0.5Mn1.5O3) | 磷酸钛锂(LiTi2(PO4)3) | 铁酸铋(BiFeO3) | |
富锂锰酸锂(Li(1+x)Mn2O4) | 磷酸硅锂(LiSiPO4) | 镧锶钴氧(LSCO) | |
★ ★ All kinds of ferroelectric, piezoelectric, superconducting, varistor, ceramic capacitor targets can be customized |
Relevant high-purity coating materials