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Metal Sputtering Targets

Silicon Sputtering Targets (Si)


MaterialSilicon
FormsPlanar,Rotary
Purity99.99%-99.9999%
SizeAs Request
ProcessSintering, Melting
AnalysisGDMS, ICP-OES, XRF
PackagingVacuum(standard export packing)
ApplicationsOptics, nanotechnology, semiconductors, wafers, circuit manufacturing.
Overview

Silicon Sputtering Targets (Si) Information

Silicon, chemical symbol Si. The atomic number is 14 and the relative atomic mass is 28.0855. It has two allotropes, amorphous silicon and crystalline silicon. It belongs to the third period of the periodic table and is a metal-like element of group IVA.The density is 2.32-2.34g/cm3, the melting point is 1410°C, and the boiling point is 2355°C. Crystalline silicon is an atomic crystal. Insoluble in water, nitric acid and hydrochloric acid, soluble in hydrofluoric acid and alkali. Hard and metallic.

Material TypeSilicon
SymbolSi (Mono-Si, Poly-Si )
Atomic Weight28.0855
Atomic Number14
Color/AppearanceDark Gray with a Bluish Tinge, Semi-Metallic
Thermal Conductivity150 W/m.K
Melting Point (°C)C)1410
Bulk Resistivity>1 OHM-CM
Coefficient of Thermal Expansion2.6 x 10-6/K
Theoretical Density (g/cc)2.32
DopantUndoped
Z Ratio0.712
SputterRF
Max Power Density20*
(Watts/Square Inch)
Type of BondIndium, Elastomer
CommentsAlloys with W; use heavy W boat. SiO produced.

Our silicon target is up to 99.9999% and is annealed by melting process. Low gas content and uniform particle size distribution.

Silicon alloy targets are often used in semiconductors, Optics, nanotechnology, wafers, circuit manufacturing, etc.

It is used for depositing SiO2, Si3N4 and other dielectric layer by magnetic sputtering process. Those thin films are characterized by excellent hardness, optic, dielectric properties, wear and corrosion resistance, which is widely applied to the field of LCD transparent conducting glass, LOW-E building glass and micro-electronics.

We sell these different shape silicon metal materials by unit weight or piece for different use in research area and for new proprietary technologies.Actual prices can vary and may be higher or lower, as determined by availability and market fluctuations. To speak to someone directly about current pricing, please click inquiry.

Si-5N-COA

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