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Ceramic Sputtering Targets

Titanium Oxide (TiO2) Sputtering Targets


High purity 4N (99.99%) titanium dioxide ceramic target. The price is for reference only, please contact customer service for quotation.

Element:TiO₂
Purity:3N5 4N
Shape:Planar target
MOQ:1PC
Package:Three-layer vacuum packaging or argon gas protection, in line with IATA, DOT packaging specification.

Overview

Physical and chemical properties

Titanium dioxide ceramic targets are made of high-quality titanium dioxide, and the color can be white or black. The color difference is mainly caused by the production environment. White titanium dioxide is sintered in the atmosphere, while black titanium dioxide is sintered in vacuum. In tests, black titanium dioxide evaporated more easily than white. But it needs to be filled with oxygen, because titanium dioxide will decompose and lose oxygen when heated and evaporated in a vacuum, forming a highly absorbing titanium oxide film. Therefore, oxygen needs to be added during the electroplating process. It is a high refractive index material suitable for electron gun evaporation. The film is dense, strong and chemically resistant.

Target Specifications

Diameter: D25.4mm, D50mm, D50.8mm, D60mm, D76.2mm, D80mm, D101.6mm, D100mm or customized

Thickness: 3mm, 4mm, 5mm, 6mm, 6.35mm can also be bound with copper backplane

Target preparation method

We typically produce metal and alloy targets by vacuum melting or hot isostatic pressing (HIP), while hot press sintering is used for ceramic targets. We choose the appropriate production process to manufacture products to meet your specific application requirements.

Application

Widely used in thin film optical coating, anti-reflection coating, semiconductor electronic coating, LCD, thin film solar energy, etc.

Related Ceramic Sputtering Materials

Oxide Sputtering Targets
Aluminum Oxide(Al2O3)Iron Tetroxide(Fe3O4)Lanthanum Nickelate(LaNiO3)Scandium Oxide(Sc2O3)Aluminum Zinc Oxide(AZO)
Fluorine Tin Oxide(FTO)Lanthanum Ferrite(LaFeO3)Strontium Titanate(SrTiO3)Antimony Tin Oxide(ATO)Gallium Oxide(Ga2O3)
Lanthanum Manganate(LaMnO3)Strontium Ruthenate(SrRuO3)Bismuth Oxide(Bi2O3)Gallium Zinc Oxide(GZO)Magnesium Oxide(MgO)
Strontium Manganate(SrMnO3)Bismuth Titanate(BiTiO3)Gadolinium Oxide(Gd2O3)Molybdenum Oxide(MoO3)Titanium Dioxide(TiO2)
Barium Titanate(BaTiO3)Hafnium Dioxide(HfO2)Niobium Oxide(Nb2Ox)Titanium Pentoxide(Ti3O5)Cerium Oxide(CeO2)
Holmium Oxide(Ho2O3)Nickel Oxide(NiO)Tantalum Oxide(Ta2O5)Chromium Oxide(Cr2O3)Indium Oxide(In2O3)
Neodymium Oxide(Nd2O3)Terbium Oxide(Tb4O7)Cobalt Oxide(CoO)Indium Tin Oxide(ITO)Lead Oxide(PbO)
Thulium Oxide(Tm2O3)Copper Oxide(CuO)Indium Zinc Oxide(IZO)Zinc Tin Oxide(ZTO)Vanadium Dioxide(VO2)
Cuprous Oxide(Cu2O)Indium Gallium Zinc Oxide(IGZO)Praseodymium Oxide(Pr6O11)Vanadium Trioxide(V2O3)Erbium Oxide(Er2O3)
Lanthanum Oxide(La2O3)Silicon Monoxide(SiO)Vanadium Pentoxide(V2O5)Europium Oxide(Eu2O3)Lanthanum Strontium Cobalt Oxide(LSCO)
Silicon Dioxide(SiO2)Tungsten Trioxide(WO3)Iron Trioxide(Fe2O3)Lanthanum Aluminate(LaAl2O3)Samarium Oxide(Sm2O3)
Yttrium Oxide(Y2O3)Yttrium Zirconium Oxide(YSZ)Yttrium Barium Copper Oxide(YBCO)Zinc Oxide(ZnO)Zirconium Oxide(ZrO2)
Fluoride Sputtering Targets
Aluminum Fluoride(AlF3)Dysprosium Fluoride(DyF3)Neodymium Fluoride(NdF3)Praseodymium Fluoride(PrF3)Yttrium Fluoride(YF3)
Barium Fluoride(BaF2)Lithium Fluoride(LiF)Sodium Fluoride(NaF)Strontium Fluoride(SrF3)Zinc Fluoride(ZnF3)
Calcium Fluoride(CaF2)Lanthanum Fluoride(LaF3)Sodium Aluminum Fluoride(Na2AlF6)Samarium Fluoride(SmF3)Ytterbium Fluoride(YbF3)
Cerium Fluoride(CeF3)Magnesium Fluoride(MgF2)Potassium Fluoride(KF)
Nitride Sputtering Targets
Aluminum Nitride(AlN)Hafnium Nitride(HfN)Silicon Nitride(Si3N4)Titanium Nitride(TiN)Zirconium Nitride(ZrN)
Boron Nitride(BN)Niobium Nitride(NbN)Tantalum Nitride(TaN)Vanadium Nitride(VN)
Carbide Sputtering Targets
Boron Carbide(B4C)Niobium Carbide(NbC)Tantalum Carbide(TaC)Tungsten Carbide(WC)Zirconium Carbide(ZrC)
Hafnium Carbide(HfC)Nickel Carbide(NiC)Titanium Carbide(TiC)Tungsten Carbide Cobalt(WC+Co)Vanadium Carbide(VC)
Molybdenum Carbide(MoC)Silicon Carbide(SiC)Titanium Carbonitride(TiCN)
Boride Sputtering Targets
Chromium Diboride(CrB2)Iron Boride(FeB)Tantalum Boride(TaB)Titanium Diboride(TiB2)Hafnium Diboride(HfB2)
Lanthanum Hexaboride(LaB6)Zirconium Diboride(ZrB2)
Sulfide Sputtering Targets
Cadmium Sulfide(CdS)Iron Sulfide(FeS)Manganese Sulfide(MnS)Tantalum Sulfide(TaS)Magnesium Sulfide(MgS)
Copper Sulfide(CuS)Lead Sulfide(PbS)Niobium Sulfide(NbS)Tungsten Sulfide(WS2)Antimony Sulfide(Sb2S3)
Cerium Sulfide(Ce2S3)Molybdenum Sulfide(MoS2)Indium Sulfide(In2S3)Zinc Sulfide(ZnS)
Silicide Sputtering Targets
Chromium Silicide(CrSi)Magnesium Silicide(MgSi)Tantalum Silicide(TaSi2)Tungsten Silicide(WSi2)Zirconium Silicide(ZrSi2)
Molybdenum Silicide(MoSi2)Nickel Silicide(NiSi)Titanium Silicide(TiSi2)Vanadium Silicide(VSi)
Selenide Sputtering Targets
Bismuth Selenide(Bi2Se3)Chromium Selenide(CrSe)Molybdenum Selenide(MoSe2)Gallium Selenide(Ga2Se3)Tungsten Selenide(WSe2)
Copper Selenide(Cu2Se)Lead Selenide(PbSe)Indium Selenide(In2Se3)Germanium Selenide(GeSe2)Tin Selenide(SnSe)
Cadmium Selenide(CdSe)Antimony Selenide(Sb2Se3)
Telluride Sputtering Targets
Cadmium Telluride(CdTe)Lead Telluride(PbTe)Germanium Telluride(GeTe)Germanium Antimony Telluride(GST)Bismuth Telluride(Bi2Te3)
Antimony Tritelluride(Sb2Te3)Antimony Tritelluride(Sb7Te3)
Antimonide Sputtering Targets
Aluminum Antimonide(AlSb)Indium Antimonide(InSb)Gallium Antimonide(GaSb)Zinc Antimonide(ZnSb)Aluminum Gallium Antimonide(AlGaSb)
Compound Sputtering Targets For Ferroelectric/Lithium Batteries
Lithium Cobalt Oxide LiCoO2Lithium Manganese Nickel Oxide LiNi0.5Mn1.5O3Lithium Iron Phosphate LiFePO4Lithium-Rich Lithium Cobalt OxideLi(1+X)CoO2Lithium-Rich Lithium ManganateLi(1+X)Mn2O4
Lithium TitanateLi4Ti5O12Aluminum Doped Lithium Cobalt Oxide AlLiCoO2Aluminum Doped Lithium Manganate LiMn2O4+AlxLithium Titanium PhosphateLiTi2(PO4)3Lithium Manganate LiMn2O4
Lithium Phosphate Li3PO4Lithium Silicon Phosphate LiSiPO4Barium TitanateBaTiO3Strontium TitanateSrTiO3Bismuth TitanateBiTiO3
Lanthanum Strontium Cobalt Oxide LSCOLanthanum Calcium Manganese Oxide LCMOLithium Cobalt Oxide LiCo2O4Lead Zirconate TitanatePZTBoron Oxide Doped Lithium Phosphate Li3PO4:B2O3
Lithium Lanthanum Titanate Li0.35La0.57TiO3Lanthanum Zirconium Lithium Oxide LLZOLanthanum Strontium Manganese OxideLSMOBismuth FerriteBiFeO3Barium Strontium Titanate BaSrTiO3



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