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Ceramic Sputtering Targets

Indium Tin Oxide (ITO) Sputtering Targets

High purity 4N (99.99%) indium tin oxide target, The price is for reference only, please contact customer service for quotation.

Shape:Planar target , Rotate target
Package:Vacuum packaging, carton, wooden box


Physical and chemical properties

Indium tin oxide ITO is a ternary composition ceramic target composed of indium, tin and oxygen in different proportions. ITO targets are one of the most widely used compounds in the thin film industry. It is evaporated or sputtered under vacuum to create transparent conductive layers in LCD manufacturing and various optical coatings.

Indium tin oxide (ITO) targets are widely used to form electrically transparent films. These films are fabricated using a DC magnetron sputtering process to make electrodes in flat panel displays, solar cells, gas sensors, and more. ITO sputtering targets require high purity, uniform microstructure, high density and high conductivity to improve the performance of ITO thin films.

ITO Target Specifications

Diameter: φ25.4mm, φ50mm, φ50.8mm, φ60mm, φ76.2mm, φ80.0mm, φ101.6mm, φ100mm

Thickness: 3mm, 3.175mm

Melting point: 1,800 ℃

Boiling point: 2830℃

Resistivity: ≤1.8×10-4Ω·cm

Actual size: 5~15μm

Resistivity: <0.12mΩ·cm

Linear thermal expansion coefficient: 8.2×10-3K-1

ITO target manufacturing process:

Manufactured, heat pressed, sintered elastomer bonded to backing sheet, cleaned and final packaged, cleaned ready for use in vacuum,

ITO target application

Indium tin oxide (ITO) sputtering targets are widely used to form electrically transparent films. These films are fabricated using a DC magnetron sputtering process to make electrodes in flat panel displays, solar cells, gas sensors, and more. It is also used in the electronic field, because the requirements for materials in the electronic field are generally relatively high. It plays a certain role in promoting the development of the electronics industry. At the same time, the target material can prolong the service life of electronic products, and the quality is more in line with the testing standards. Generally, the phenomenon of unqualified output rarely occurs, and the appearance can also meet the requirements. people's demands.

Related Ceramic Sputtering Materials

Oxide Sputtering Targets
Aluminum Oxide(Al2O3)Iron Tetroxide(Fe3O4)Lanthanum Nickelate(LaNiO3)Scandium Oxide(Sc2O3)Aluminum Zinc Oxide(AZO)
Fluorine Tin Oxide(FTO)Lanthanum Ferrite(LaFeO3)Strontium Titanate(SrTiO3)Antimony Tin Oxide(ATO)Gallium Oxide(Ga2O3)
Lanthanum Manganate(LaMnO3)Strontium Ruthenate(SrRuO3)Bismuth Oxide(Bi2O3)Gallium Zinc Oxide(GZO)Magnesium Oxide(MgO)
Strontium Manganate(SrMnO3)Bismuth Titanate(BiTiO3)Gadolinium Oxide(Gd2O3)Molybdenum Oxide(MoO3)Titanium Dioxide(TiO2)
Barium Titanate(BaTiO3)Hafnium Dioxide(HfO2)Niobium Oxide(Nb2Ox)Titanium Pentoxide(Ti3O5)Cerium Oxide(CeO2)
Holmium Oxide(Ho2O3)Nickel Oxide(NiO)Tantalum Oxide(Ta2O5)Chromium Oxide(Cr2O3)Indium Oxide(In2O3)
Neodymium Oxide(Nd2O3)Terbium Oxide(Tb4O7)Cobalt Oxide(CoO)Indium Tin Oxide(ITO)Lead Oxide(PbO)
Thulium Oxide(Tm2O3)Copper Oxide(CuO)Indium Zinc Oxide(IZO)Zinc Tin Oxide(ZTO)Vanadium Dioxide(VO2)
Cuprous Oxide(Cu2O)Indium Gallium Zinc Oxide(IGZO)Praseodymium Oxide(Pr6O11)Vanadium Trioxide(V2O3)Erbium Oxide(Er2O3)
Lanthanum Oxide(La2O3)Silicon Monoxide(SiO)Vanadium Pentoxide(V2O5)Europium Oxide(Eu2O3)Lanthanum Strontium Cobalt Oxide(LSCO)
Silicon Dioxide(SiO2)Tungsten Trioxide(WO3)Iron Trioxide(Fe2O3)Lanthanum Aluminate(LaAl2O3)Samarium Oxide(Sm2O3)
Yttrium Oxide(Y2O3)Yttrium Zirconium Oxide(YSZ)Yttrium Barium Copper Oxide(YBCO)Zinc Oxide(ZnO)Zirconium Oxide(ZrO2)
Fluoride Sputtering Targets
Aluminum Fluoride(AlF3)Dysprosium Fluoride(DyF3)Neodymium Fluoride(NdF3)Praseodymium Fluoride(PrF3)Yttrium Fluoride(YF3)
Barium Fluoride(BaF2)Lithium Fluoride(LiF)Sodium Fluoride(NaF)Strontium Fluoride(SrF3)Zinc Fluoride(ZnF3)
Calcium Fluoride(CaF2)Lanthanum Fluoride(LaF3)Sodium Aluminum Fluoride(Na2AlF6)Samarium Fluoride(SmF3)Ytterbium Fluoride(YbF3)
Cerium Fluoride(CeF3)Magnesium Fluoride(MgF2)Potassium Fluoride(KF)
Nitride Sputtering Targets
Aluminum Nitride(AlN)Hafnium Nitride(HfN)Silicon Nitride(Si3N4)Titanium Nitride(TiN)Zirconium Nitride(ZrN)
Boron Nitride(BN)Niobium Nitride(NbN)Tantalum Nitride(TaN)Vanadium Nitride(VN)
Carbide Sputtering Targets
Boron Carbide(B4C)Niobium Carbide(NbC)Tantalum Carbide(TaC)Tungsten Carbide(WC)Zirconium Carbide(ZrC)
Hafnium Carbide(HfC)Nickel Carbide(NiC)Titanium Carbide(TiC)Tungsten Carbide Cobalt(WC+Co)Vanadium Carbide(VC)
Molybdenum Carbide(MoC)Silicon Carbide(SiC)Titanium Carbonitride(TiCN)
Boride Sputtering Targets
Chromium Diboride(CrB2)Iron Boride(FeB)Tantalum Boride(TaB)Titanium Diboride(TiB2)Hafnium Diboride(HfB2)
Lanthanum Hexaboride(LaB6)Zirconium Diboride(ZrB2)
Sulfide Sputtering Targets
Cadmium Sulfide(CdS)Iron Sulfide(FeS)Manganese Sulfide(MnS)Tantalum Sulfide(TaS)Magnesium Sulfide(MgS)
Copper Sulfide(CuS)Lead Sulfide(PbS)Niobium Sulfide(NbS)Tungsten Sulfide(WS2)Antimony Sulfide(Sb2S3)
Cerium Sulfide(Ce2S3)Molybdenum Sulfide(MoS2)Indium Sulfide(In2S3)Zinc Sulfide(ZnS)
Silicide Sputtering Targets
Chromium Silicide(CrSi)Magnesium Silicide(MgSi)Tantalum Silicide(TaSi2)Tungsten Silicide(WSi2)Zirconium Silicide(ZrSi2)
Molybdenum Silicide(MoSi2)Nickel Silicide(NiSi)Titanium Silicide(TiSi2)Vanadium Silicide(VSi)
Selenide Sputtering Targets
Bismuth Selenide(Bi2Se3)Chromium Selenide(CrSe)Molybdenum Selenide(MoSe2)Gallium Selenide(Ga2Se3)Tungsten Selenide(WSe2)
Copper Selenide(Cu2Se)Lead Selenide(PbSe)Indium Selenide(In2Se3)Germanium Selenide(GeSe2)Tin Selenide(SnSe)
Cadmium Selenide(CdSe)Antimony Selenide(Sb2Se3)
Telluride Sputtering Targets
Cadmium Telluride(CdTe)Lead Telluride(PbTe)Germanium Telluride(GeTe)Germanium Antimony Telluride(GST)Bismuth Telluride(Bi2Te3)
Antimony Tritelluride(Sb2Te3)Antimony Tritelluride(Sb7Te3)
Antimonide Sputtering Targets
Aluminum Antimonide(AlSb)Indium Antimonide(InSb)Gallium Antimonide(GaSb)Zinc Antimonide(ZnSb)Aluminum Gallium Antimonide(AlGaSb)
Compound Sputtering Targets For Ferroelectric/Lithium Batteries
Lithium Cobalt Oxide LiCoO2Lithium Manganese Nickel Oxide LiNi0.5Mn1.5O3Lithium Iron Phosphate LiFePO4Lithium-Rich Lithium Cobalt OxideLi(1+X)CoO2Lithium-Rich Lithium ManganateLi(1+X)Mn2O4
Lithium TitanateLi4Ti5O12Aluminum Doped Lithium Cobalt Oxide AlLiCoO2Aluminum Doped Lithium Manganate LiMn2O4+AlxLithium Titanium PhosphateLiTi2(PO4)3Lithium Manganate LiMn2O4
Lithium Phosphate Li3PO4Lithium Silicon Phosphate LiSiPO4Barium TitanateBaTiO3Strontium TitanateSrTiO3Bismuth TitanateBiTiO3
Lanthanum Strontium Cobalt Oxide LSCOLanthanum Calcium Manganese Oxide LCMOLithium Cobalt Oxide LiCo2O4Lead Zirconate TitanatePZTBoron Oxide Doped Lithium Phosphate Li3PO4:B2O3
Lithium Lanthanum Titanate Li0.35La0.57TiO3Lanthanum Zirconium Lithium Oxide LLZOLanthanum Strontium Manganese OxideLSMOBismuth FerriteBiFeO3Barium Strontium Titanate BaSrTiO3