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Aluminium Copper (AlCu) Sputtering Targets
High purity 5N (99.999%) aluminum copper alloy target, The price is for reference only, please contact customer service for quotation.
| Element: | AlCu |
|---|---|
| Purity: | 4N 5N |
| Shape: | Planar target |
| MOQ: | 1PC |
| Package: | Three-layer vacuum packaging or argon gas protection, in line with IATA, DOT packaging specification |
Overview
Physical and chemical properties
Aluminum-copper alloy targets are produced by vacuum melting techniques and are commonly used as interconnect materials in integrated circuit production. Compared with aluminum interconnects, high-purity aluminum-copper AlCu (0.5–4%) interconnects have a more uniform internal microstructure, which can effectively improve the electromigration and diffusion of interconnects to the wafer. With the high purity of 5N, uniform grain size, and low oxygen content, end users can obtain constant corrosion rates and high purity and uniform thin film coatings during the PVD process.
Available components: AlCu99.5/0.5wt%, AlCu99/1wt%, AlCu98/2wt%, AlCu95/5wt%.
Process steps
Material Preparation - Refining (Three Layer Electrolysis Process) - Melting and Casting (Resistance Furnace - Semi-Continuous Casting) - Grain Refinement (Thermo-Mechanical Treatment) - Metallographic Inspection - Machining - Dimensional Inspection - Cleaning - Final Inspection - Marking - Packaging - Shipping
AlCu-5N-COA
| Alloy Sputtering Targets | |||
| Nickel vanadium target（NiV target） | 3N5 | Iron manganese target（FeMn target） | 3N5 |
| Nickel chromium target（NiCr target） | 2N8，3N，3N5 | Aluminum copper target（AlCu target） | 4N，4N5，5N |
| Nickel iron target（NiFe target） | 3N5 | Aluminum silicon target（AlSi target） | 4N，4N5，5N |
| Nickel platinum target（NiPt target） | 3N5 | Aluminum titanium target（AlTi target） | 4N，4N5 |
| Nickel copper target（NiCu target） | 3N5 | Aluminum tin copper target（AlSnCu target） | 4N |
| Nickel copper titanium target（NiCuTi target） | 3N5 | Aluminum copper silicon target（AlCuSi target） | 4N |
| Nickel copper manganese target（NiCuMn target） | 3N5 | Aluminum chromium target（AlCr target） | 4N |
| Aluminum titanium target（NiTi target） | 3N5，4N | Aluminum neodymium target（AlNd target） | 4N |
| Nickel tungsten target（NiW target） | 4N | Aluminum scandium target（AlSc target） | 3N5 |
| Nickel cobalt target（NiCo target） | 3N5 | Aluminum zinc target（AlZn target） | 3N5，4N |
| Nickel chromium silicon target（NiCrSi target） | 3N | Aluminum magnesium target（AlMg target） | 3N5，4N |
| Nickel chromium iron target（NiCrFe target） | 3N | Vanadium titanium target（VTi target） | 3N5 |
| Nickel iron molybdenum target（NiFeMo target） | 3N | Vanadium tantalum tungsten target（VTaW target） | 3N5 |
| Cobalt-tantalum-zirconium target（CoTaZr target） | 3N5 | Tungsten-titanium target（WTi target） | 3N5，4N |
| Cobalt chromium target（CoCr target） | 3N5 | Tungsten molybdenum target（WMo target） | 3N5 |
| Cobalt chromium molybdenum target（CoCrMo target） | 3N5 | Molybdenum niobium target（MoNb target） | 3N5 |
| Cobalt chromium tungsten target（CoCrW target） | 3N5 | Molybdenum tantalum target（MoTa target） | 3N5 |
| Cobalt chromium nickel target（CoCrNi target） | 3N5 | Molybdenum sodium target（MoNa target） | 3N5 |
| Copper-nickel target（CuNi target） | 3N5 | Niobium-tin target（NbSn target） | 3N5 |
| Copper nickel titanium target（CuNiTi target） | 3N5 | Niobium zirconium target（NbZr target） | 3N5 |
| Copper gallium target（CuGa target） | 4N，4N5 | Tantalum tungsten target（TaW target） | 3N5 |
| Copper indium target（CuIn target） | 4N，4N5 | Tantalum niobium target（TaNb target） | 3N5 |
| Copper indium gallium target（CuInGa target） | 4N，4N5 | Chromium aluminum target（CrAl target） | 3N |
| Copper aluminum target（CuAl target） | 4N，4N5，5N | Chromium silicon target（CrSi target） | 3N |
| Copper tin target（CuSn target） | 4N | Chromium silicon aluminum target（CrSiAl target） | 3N |
| Iron hafnium target（FeHf target） | 3N5 | Zinc tin target（ZnSn target） | 4N |
| Iron-nickel target（FeNi target） | 3N5，4N | Zinc-aluminum target（ZnAl target） | 4N |
| Iron-silicon target（FeSi target） | 3N5 | Tin-silver-copper target（SnAgCu target） | 4N |
| Iron-cobalt target（FeCo target） | 3N5 | Indium-tin target（InSn target） | 4N |
